Matej Fekete investigates preparation and properties of TiAlON protective thin films
Dr. Matej Fekete's new project aims to identify the impact of deposition parameters on plasma properties and correlate them with the properties of prepared TiAlON protective thin films that could withstand higher loads than current protective thin films. In the next thirty months, he will deal with their development from deposition and process diagnostics to thin film analysis and implementation in the industry.