Společný seminář ÚFKL a ÚFE: Andreas Dorsel

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Andreas Dorsel (Carl Zeiss SMT GmbH): Nano-Lithography – Where science meets industry

 

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Nano-Lithography – Where science meets industry

Andeas Dorsel
Carl Zeiss SMT GmbH

After a cursory glimpse on the history of microlithography, this talk will provide you with a solid notion of what can be achieved in nano-lithography today, what the present technical limitations are and what we consider at present fundamental boundaries of what may be possible in the future. Carl Zeiss SMT has been in this business for more than 50 years and has lived through many of the technological milestones from the early beginnings of integrated circuits to present-day extreme integration using EUV and allowing qualitatively new applications of micro- or rather nano-electronics. While the technologies involved are more than can be covered in a single seminar, you will get an overview of a wide range of technical aspects that have to be addressed in order to succeed – and how we are doing in addressing them.

 

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